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Alexei N. Nazarov, a) Volodymyr O. Yukhymchuk, Yurii V. Gomeniuk, Sergiy B. Kryvyi, Pavel N. Okholin, Petro M. Lytvyn, Vasyl P. Kladko, Volodymyr S. Lysenko, Volodymyr I. Glotov, Illya E. Golentus, Enrico Napolitani, Ray Duffy. // Journal of Vacuum Science and Technology, B, V.35, Issue 5, 051203 (2017). http://doi.org/10.1116/1.4996139