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N. Korsunska, L. Borkovska, Yu. Polischuk, O. Kolomys, P. Lytvyn, I. Markevich, V. Strelchuk, V. Kladko, O. Melnichuk, L. Melnichuk, L. Khomenkova, C. Guillaume, X. Portier // Materials Science in Semiconductor Processing, V.94, P.51-56 (2019). https://doi.org/10.1016/j.mssp.2019.01.041