Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

D. Savchenko, V. Kulikovsky, V. Vorlíček, J. Lančok, V. Kiselov, E. Kalabukhova // Physica Status Solidi (b), v.251, p.1178-1185 (2014)

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