Conducting and topographic AFM analysis of Hf-doped and Al-doped Ta2O5 films

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

E. Atanassova, P. Lytvyn, R.V. Konakova, V.F. Mitin, D. Spassov // Thin Solid Films 519, pp. 8182-8190. (2011)

Nav view search