Peculiarities of the Impurity Redistribution Under Ultra-Shallow Junction Formation in Silicon.

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

V. Litovchenko, B. Romanyuk, O. Oberemok, V. Popov, V. Melnik, K. Rudenko and V. Vyurkov // Advanced Mat. Res., v.854, 2014, p.141-145

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