Effect of Laser Beam Irradiation on the Electrophysical Properties of the Interface in Boron Ion Implanted MIS Structures

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V.S. Lysenko, and A.N. Nazarov, phys. stat. sol. (a) vol. 49, pp.405-411 (1978)

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