An experimental study of properties of ultrathin Si layer with bonded Si/SiO2 interface

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Naumova O., Fomin B., Popov V., Strelchuk V., Nikolenko A., Nazarov A. // Advanced Materials Research. - 2014. -Vols. 854. - pp 3-10.

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