Сorrelation of the deposition parameters, film thickness and mechanical stresses in a-C:H films on silicon substrates

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

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A.V. Vasin, L.A. Matveeva, A.G. Gontar, A.M. Kutsay // Functional materials, №1, p.173-175 (2000)

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