Electroreflectance spectroscopy and scanning electron microscopy study of silicon microrelief wafers with various surface pretreatments

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

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Electroreflectance spectroscopy and scanning electron microscopy study of silicon microrelief wafers with various surface pretreatments

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T.Ya. Gorbach, R.Yu. Holiney, L.A. Matveeva, P.S. Smertenko, S.V. Svechnikov, E.F. Venger // Semiconductor Physics, Quantum Electronics & Optoelectonics, v.1, №1, p.66-70 (1998)

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