Conductive-atomic force microscopy characterization of Ta2O5/SiO2 stacks and the effect of microwave irradiation

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

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E. Atanassova, P. Lytvyn, R.V. Konakova, V.F. Mitin, D.S passov // Journal of Physics D: Applied Physics, 42, 145301. (2009)

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