Ge-film resistance and Si-based diode temperature microsensors for cryogenic applications

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

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N.S. Boltovets, V.V. Kholevchuk, R.V. Konakova, V.F. Mitin and E.F. Venger // Sensors and Actuators, Vol. 92, pp. 191-196 (2001)

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