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V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine
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Research divisions Publications dep14 dep-14-2015 Effect of substrate temperature on structural and electrical properties of Al-doped zinc oxide thin films deposited by layer-by-layer method at magnetron sputtering. Dranchuk M.V., IevtushenkoA.I., Karpyna V.A., Lytvyn O.S., Romanyuk V.R., TkachV.M., Baturin V.A., Karpenko O.Y., Kuznetsov V.M., Popovych V.I., Dusheyko M.G., Lashkarev G.V. // SensorElectronicsand MicrosystemTechnologies. – 2015. – V. 12, № 1. – P. 5-12.
