Effect of the stoichiometry of Si-rich silicon nitride thin films on their photoluminescence and structural properties

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

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T.V. Torchynska, J.L. Casas Espinola, E. Vergara Hernandez, L. Khomenkova, F. Delachat, A. Slaoui // Thin Solid Films. – 2015. - v. 581. - P. 65-69.

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