Optical, structural and electrical characterizations of stacked Hf-based and silicon nitride dielectrics

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

You are here: Home

L. Khomenkova, P. Normand, F. Gourbilleau, A. Slaoui, C. Bonafos. // Thin Solid Films. – 2016. – v.617, Part B. – P. 143–149.

Nav view search