V Litovchenko V. Stimulated creation of the SOI structures with Si nanoclusters by low dose SIMOX technology

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V. Litovchenko, B. Romanyuk, V. Melnik, V. Klad’ko, V. Popov, O. Oberemok, I. Khatsevich// Solid State Phen. Vol. 178-179, P. 17-24 (2011)

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