V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine
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lab11-2
lab11-2-2017
Emitting modification in Si-rich-SiNx films versus silicon nitride compositions
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T. Torchynska, G. Polupan, L. Khomenkova, A. Slaoui // MRS Communications. – 2017. – V.7,№2.-p.280-285.