β-Ketoiminato-based copper (ii) complexes as CVD precursors for copper and copper oxide layer formation

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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β-Ketoiminato-based copper (ii) complexes as CVD precursors for copper and copper oxide layer formation

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E. Pousaneh, M. Korb, V. Dzhagan, M. Weber, J. Noll, M. Mehring, D.R.T. Zahn, S.E. Schulz, H. Lang // Dalton Transactions. (2018) doi.org/10.1039/C8FD00142A.

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