A study of defects of the structure of epitaxial layers of silicon carbide

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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S. F. Avramenko, M. Ya.Valakh, V. S. Kiselev, M. Ya. Skorokhod // Met.Phys.Adv.Tech. V. 18, P. 29-38 (1999)

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