Effect of Si nanoparticles embedded in SiOx on optical properties of the films studied by spectroscopic ellipsometry and photoluminescence spectroscopy

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Effect of Si nanoparticles embedded in SiOx on optical properties of the films studied by spectroscopic ellipsometry and photoluminescence spectroscopy

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Szekeres, T. Nikolova, A. Paneva, I. Lisovskyy, P.E. Shepeliavyi, G.Yu. Rudko // Optical Materials V. 30, Is. 7, P. 1115-1120 (2008)

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