Nonstoichiometric amorphous silicon carbide films as promising antireflection and protective coatings for germanium in IR spectral range

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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lab11-3-2019

Nonstoichiometric amorphous silicon carbide films as promising antireflection and protective coatings for germanium in IR spectral range

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LukianovA.N., KlyuiN.I., BoSha, Dusheiko M.G., Lozinskii V.B., Liptuga A.I., Kasatkin V.P., Bingbing Liu // Elsevier. Optical Materials. – 2019. – Vol. 88, – P. 445-450

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