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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
Projects Publications dep06 dep-06-2015 RF plasma treatment of shallow ion-implanted layers of germaniumP.N. Okholin, V.I. Glotov, A.N. Nazarov, V.O. Yuchymchuk, V.P. Kladko, S.B. Kryvyi, P.M. Lytvyn, S.I. Tiagulskyi, V.S. Lysenko, M. Shayesteh, R. Duffy // Materials Science in Semiconductor Processing. V.41, Issue 3, P.001-006 (2015). DOI: 10.1016/j.mssp.2015.08.028.
