Non-destructive control of critical defects and diagnostics of InGaN/GaN heterostructures in power LEDs by using their microplasma characteristics

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V.P. Veleschuk, A.I. Vlasenko, Z.K. Vlasenko, M.P. KisselyukandV.V. Borshch // Materials Research Express. – 2015. – № 2. – Р. 055902.

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