Деталі

Перегляди: 5059

A.P. Shapovalov, I.V. Korotash, E.M. Rudenko, F.F. Sizov, D.S. Dubyna, L.S. Osipov, D.Yu. Polotskiy, Z.F. Tsybrii, A.A. Korchovyi, "Structure and optical properties of AlN films obtainedusing the cathodic arc plasma deposition technique" / Semiconductor Physics, Quantum Electronics & Optoelectronics, V. 18, N 2. p. 117-122 (2015). doi: 10.15407/spqeo18.02.117.