Si/Si1-xGex epitaxial layers and superlattices. Growth and structural characteristics

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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F.F. Sizov, V.P. Kladko, S.V. Plyatsko, A.P. Shelyakov, Yu.N. Kozyrev, V.M. Ogenko // Semiconductors, V.31(8), P.786-788 (1997).