Stimulated Creation of the SOI Structures with Si Nano-Clusters by Low–Dose SIMOX Technology

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V. Litovchenko, B. Romanyuk, V. Melnik, V. Kladko, V. Popov, O. Oberemok, I. Khatsevich // Solid State Phenomena, Vols.178-179, P.17-24, (2011).