TEM characterisation of suicide phase formation in Ni-based ohmic contacts to 4H n-SiC

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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M. Wzorek, A. Czerwinski, A. Kuchuk, J. Ratajczak, A. Piotrowska, J. Katcki // Materials Transactions, 52 (3), P.315-318, (2011).