Measurements of precision value of ohmic contact resistance to n-SiC by c-TLM method

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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K. Golaszewska-Malec, J. Kiszkurno, A. Kuchuk, W. Jung, M. Guziewicz, E. Kaminska, A. Piotrowska. // Elektronika, Vol.LII (9), P.98-102 ( 2011).