Thermal Stability of Thin Amorphous Ta–Si–N Films Used in Au/GaN Metallization

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A.V. Kuchuk, V.P. Kladko, V.F. Machulin, and A. Piotrowska // Technical Physics, Vol. 51, No. 10, pp. 1383–1385, (2006).