Technology and comparative investigation of ternary W-TiN and Ta(Ti)-SiN thin films diffusion barriers

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Kuchuk A.V., Kladko V.P., Machulin V.F., Piotrowska A. // Proceedings of 18^th International Symposium “Thin Films in Optics and Nano-Electronics” at Kharkov Nanotechnology Assembly, Kharkov, Vol. 2. P. 68-72, (2006).

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