Barrier properties of Ta–Si–N films in Ag-and Au-containing metallization

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A.V. Kuchuk, J. Ciosek, A. Piotrowska, E. Kaminska, A. Wawro, O.S. Lytvyn, L. Nowicki, R. Ratajczak // Vacuum, Vol. 74, P. 195–199, (2004).