Mechanisms of oxygen precipitation in Cz-Si wafers subjected to rapid thermal anneals

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A. Sarikov, I. Lisovskyy, V. Litovchenko, M. Voitovich, S. Zlobin, V. Kladko, M. Slobodian and V. Machulin // Journal of the Electrochemical Society Vol.158, Issue 8. P.H772-H777 (2011).

http://jes.ecsdl.org/content/158/8/H772.full.pdf+html

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