Analysis of electrically active N-O complexes in nitrogen-doped CZ silicon crystals by FTIR spectroscopy

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

Search

Details: Hits: 8403

Alt H.Ch., Gomeniuk Y.V., Bittersberger F., Kempf A. and Zemke D. Materials Science in Semiconductor Processing, vol. 9, p. 114-116. (2006)