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Ge-on-GaAs Film resistance thermometrers

№46 Laboratory of Physical and technological problems sensor electronics
V.F. Mitin, V.V. Kholevchuk

Applications:

    Ge-on-GaAs resistance thermometers are intended for static and dynamic temperature measurements and covering the temperature range for operation from 0.03 K to 500 K.

Description:

    The thermometers are based on Ge film resistors deposited onto semi-insulating GaAs substrates using vacuum technology. Ge-on-GaAs film temperature sensing elements are produced using standard semiconductor processing techniques and provide high device sensitivity within the range 0.03 K to 500 K. The prepared sensing elements are then employed in different packages. At present three types of sensor packages are offered:- cylindrical canister package, made from gold plated copper (3 mm in diameter and 5.0 mm long), micro-package (1.2 mm in diameter and 1.0 mm long) and micro-package with plate (2 mm square by 0.15 mm thick).

Main advantages:

•    wide temperature range for operation (0.03 to 500 K)
•    monotonic response over a wide temperature range
•    high sensitivity
•    high accuracy
•    small temperature reading errors for operation in magnetic fields
•    small size
•    extremely fast response to temperature changes
•    high radiation tolerance
•    high quality and low price

Operating characteristics:

Typical dependences of resistance and sensitivities for thermometers of different models

Temperature Errors, ΔT/T0 , (percent) as a Function of Magnetic Field and Temperature

Model          Temperature (K)    Magnetic field induction (T)
                                                    2.5      4        6        8        14
TTR-G                  0.5                    0.43    -1.74    -3.65  -6.2       -
                          1.0                     0.0     -0.3     -0.8       -        -
                          2.1                    -0.82   -2.8     -6.8    -11.12  24.1
                          4.2                    -0.4     -1.0     -2.7    -4.7    -12.5
                          77.4                  -0.13    -0.21   -0.3    -0.45  -2.0
TTR-D                  0.1                   63.9      66.7    69.5      -        -
                          0.3                     0.5     -0.55    -1.0      -        -
                          4.2                   -5.0      -8.1      -12.0    -        -
TTR-M                  4.2                    0.5       0.37     -0.44  -2.0     -