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Integral absolute, differential and gauge pressure sensors
№25 Laboratory of anisotropic semiconductors
G.G. Babichev, E.O. Zinchenko, S.I. Kozlovskiy
Application note. The pressure sensors could be used in different branches of industry for control and management of technological processes, in gas and oil transportations and processing, chemical and automotive industries, biotechnology, water ecology, food and paper industries, airspace technology, atomic power engineering, agricultural and municipal services, medicine, etc.
Description. The operating principle of the pressure sensors is based on piezoresistance effect in silicon crystals. At application of the directed elastic strain conductivity of the crystal becomes anisotropic owing to that at application of longitudinal electrical field the transverse electrical field appears and associated with it the transverse electromotive force (TEF). The value of the TEF is proportional to magnitude of the strain. The sensitive element of the pres-sure sensors is integrated in the planar part of a profiled silicon square shaped diaphragm with rigid centre island. The load application, uniformly distributed over the diaphragm, produces a uniaxial stress in the position of the sensitive element. The sensitive element has differential structure and one of the TEF elements is uniaxial compressed while another is uniaxial stretched (or vice versa). This structure of the sensitive element is insensitive to the “parasitic” planar elastic and thermo elastic stresses.
FEATURES
Pressure sensors without media separating diaphragm. Pressure sensorscab be used for measurement of absolute, differential and gauge pressure of non-aggressive liquids and gasses without hard contamination.
Table 1.
| Characteristics | Unit | Value |
| Operating pressure ranges | kPa | 0-10, 20, 40, 100, 160, 250, 400, 600, 1000, 1500 |
| Supply voltage | V | 5-7 |
| Full scale span (FSS) | mV | 50 ±10 |
| Zero pressure offset | mV | ±0.1 |
| Operating temperature range | °C | -55 - + 125 |
| Accuracy | %FSS | 0.1 |
| Temperature error in temperature range from -20°C up to + 90 °С | %FSS | 0.1 |
| Dimension | mm | 30 х 17 х 10 |
| Weight | g | 3-10 |
Pressure sensors with media separating diaphragm. Pressure sensorscab be used for measurement of absolute and differential pressure of aggressive liquids and gasses with hard contamination.
Table 2
| Characteristics | Unit | Value |
| Operating pressure ranges | kPa | 0-10, 40, 100, 160, 250, 400, 600, 1000, 1500, 2500, 4000, 6000, 10000, 15000 |
| Supply voltage | V | 5-7 |
| Full scale span (FSS) | mV | 50 ±10 |
| Zero pressure offset | mV | ±0.15 |
| Operating temperature range | °C | -55 - + 125 |
| Accuracy | %FSS | 0.15 |
| Temperature error in temperature range from -20°C up to + 90 °С | %FSS | 0.2 |
| Dimension | mm | 15 х 17 х 13 |
| Weight | g | 100-150 |
Original constructive and technological decisions are protected by patents of Ukraine №18307 and № 19080.