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Savkina, R.K., A.B. Smirnov, A.I. Gudymenko, V.A.Morozhenko, A.S. Nikolenko, M.I. Smoliy, T.G. Кryshtab// Surf Coat Technol.- 2017.- Vol.343, N15.- pp. 17-23. https://doi.org/10.1016/j.surfcoat.2017.11.065
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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
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