Generation and Auto-Revealing of Dislocations in Si During Macropore Etching

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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Konin K.P., Gudymenko O.Yo., Kladko V.P., Lytvynenko O.O., Morozovs’ka D.V. // Journal of Electronic Materials, Vol.47, №9, P.5113–5117 (2018).

https://doi.org/10.1007/s11664-018-6502-4