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T. Torchynska, B. El Filali, L. Khomenkova, X. Portier, F. Gourbilleau // J. Vac. Sci. Technol. A . – 2019. – V. 37. – p. 031503 DOI: https://doi.org/ 10.1116/1.5085143
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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
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