Nonstoichiometric amorphous silicon carbide films as promising antireflection and protective coatings for germanium in IR spectral range.

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

Search

Details: Hits: 2546

A.N. Lukianov, N.I. Klyui, Bo Sha, M.G. Dusheiko, V.B. Lozinskii, A.I. Liptuga, V.P. Kasatkin,Bingbing Liu //Optical Materials 88 (2019) 445-450.