V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

Search

O. Yilmazoglu, L. Considine, R. Joshi, H. Mimura, D. Pavlidis, H.L. Hartnagel, J.J. Schneider, A. Evtukh, M. Semenenko, V. Litovchenko // Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 30, iss. 4, article no. 042203 (2012)