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V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
National Academy of Sciences of Ukraine |
Research divisions Publications dep15 dep-15-2016 Hydrogen Plasma Modification of Shallow Implanted Germanium LayersNazarov A.N., Yukhymchuk V.O., Okholin P.N., Lytvyn P.M., Lysenko V.S., Glotov V.I., Nazarova T.M., Napolitani E., and Duffy R. // Proceedings of the International Conference Nanomaterials: Application and Properties, v.5, 01PISERE02 4pp. (2016)
