Oxygen gettering in low-energy arsenic or antimony ion implanted Cz-silicon.

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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O. Oberemok, V. Kladko, V. Litovchenko, B. Romanyuk, V. Popov, V. Melnik and J. Vanhellemont // Phys. Status Solidi C 11, No. 11–12, 1634–1639 (2014)

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