The Raman Diagnostics of Carbon Films Obtained by Electron-beam Deposition on Cu, Al and Ni Substrates

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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V.O. Osokin, V.О. Panibratskiy, Y.A. Stel¢makh, P.O. Shpak, V.O. Yukhymchuk. // J. NANO- ELECTRON. PHYS. - 2021. - V. 13, p. 02023