Paramagnetic Defects and Photoluminescence in Carbon Rich a-SiC:H Films: Role of Hydrogen and Excess of Carbon

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A.V. Vasin, A.A. Konchits, S.P. Kolesnik, A.V. Rusavsky, V.S. Lysenko, A.N. Nazarov, Y. Ishikawa, S. Ashok // Proc. of Int. Conf. MRS-2007 V. 994, P. 392-398 (2007)

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