- Деталі
- Перегляди: 32611
Alexei N. Nazarov, a) Volodymyr O. Yukhymchuk, Yurii V. Gomeniuk, Sergiy B. Kryvyi, Pavel N. Okholin, Petro M. Lytvyn, Vasyl P. Kladko, Volodymyr S. Lysenko, Volodymyr I. Glotov, Illya E. Golentus, Enrico Napolitani, Ray Duffy. // Journal of Vacuum Science and Technology, B, V.35, Issue 5, 051203 (2017). http://doi.org/10.1116/1.4996139