The features of structural-impurity ordering of interfaces in Ta2O5-p-Si heterostructures (exposed to microwave pretreatment and aging) induced by further microwave treatment

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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E. Atanassova, E.Yu. Kolyadina, R.V. Konakova, L.A. Matveeva, V.F. Mitin, V.V. Shynkarenko // Semiconductor Physics, Quantum Electronics & Optoelectronics, v.11, №4, p.311-318 (2008)

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