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Yu.M. Shwarts, V.N. Sokolov, M.M. Shwarts, E.F. Venger // Digest of technical papers of the 11th International Conf. on Solid - State Sensors and Actuators, Session 4B2: Flow & Thermal Sensors , Munich, Germany, p.1500-1503 (2001)
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V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine
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