Auger–spectrocsopic investigation of a-C:H films on silicon microrelief substrates

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A.V. Vasin, E.F. Venger, L.A. Matveeva, T.Ya. Gorbach, S.V. Svechnikov // Carbon, v.36, №5-6, p.513-515 (1998)