Auger-Spectroscopic Investigation of a-C:H Films on Micro-Roughness Substrates

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

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A.V. Vasin, T.Ya. Gorbach, A.G. Gontar, A.M. Kutsay // Journal of Chemical Vapor deposition, v.6, №1 (1997)