Optical and magnetic resonance study of a-SiCxNy films obtained by magnetron sputtering

V.E. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine

National Academy of Sciences of Ukraine

Search

Details: Hits: 6303

D. Savchenko, V. Kulikovsky, V. Vorlíček, J. Lančok, V. Kiselov, E. Kalabukhova // Physica Status Solidi (b), v.251, p.1178-1185 (2014)