Phase transformation and light emission in Er-doped Si-rich HfO2 films prepared by magnetron sputtering

V. Lashkaryov Institute of Semiconductor Physics of National Academy of Sciences of Ukraine

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T. Torchynska, B. El Filali, L. Khomenkova, X. Portier, F. Gourbilleau // J. Vac. Sci. Technol. A . – 2019. – V. 37. – p. 031503 DOI: https://doi.org/ 10.1116/1.5085143

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